On a Novel Technique for the Electrical Characterization of Polycrystalline Silicon

Author

Ionescu, A.M. ; Tringe, J.W. ; Chovet, A. ; Plummer, J.

Author_Institution

Swiss Federal Institute of Technology, Lausanne, Switzerland

fYear

2000

fDate

11-13 September 2000

Firstpage

420

Lastpage

423

Keywords

Contacts; Geometry; Grain size; Linear predictive coding; MOSFETs; Network address translation; Performance evaluation; Probes; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

DOI

10.1109/ESSDERC.2000.194804

Filename

1503734

Link To Document