Title :
On a Novel Technique for the Electrical Characterization of Polycrystalline Silicon
Author :
Ionescu, A.M. ; Tringe, J.W. ; Chovet, A. ; Plummer, J.
Author_Institution :
Swiss Federal Institute of Technology, Lausanne, Switzerland
fDate :
11-13 September 2000
Keywords :
Contacts; Geometry; Grain size; Linear predictive coding; MOSFETs; Network address translation; Performance evaluation; Probes; Silicon; Testing;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194804
