Title :
Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source
Author :
Isai, G.I. ; Kovalgin, A.Y. ; Holleman, J. ; Woerlee, P.H. ; Wallinga, H. ; Cobianu, C.
Author_Institution :
University of Twente, Enschede, The Netherlands
fDate :
11-13 September 2000
Keywords :
Cyclotrons; Dielectric substrates; Electrons; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Pollution measurement; Resonance; Silicon;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194805
