DocumentCode
1919305
Title
R&D of Micromechanical Element Manufacturing Processes for Microwave Devices
Author
Timoshenkov, S.P. ; Kalugin, V.V. ; Klochko, V.A. ; Kalugina, V.I. ; Zotov, A.S. ; Prokop´ev, E.P.
Author_Institution
Technical Univ., Moscow
fYear
2007
fDate
10-14 Sept. 2007
Firstpage
527
Lastpage
528
Abstract
Results of R&D into micromechanical element (MME) manufacturing processes for microelectromechanical system (MEMS) applications in microwave devices are discussed. Processes of silicon and glass wafer treatment at various stages of MME MEMS manufacture are described.
Keywords
micromechanical devices; semiconductor device manufacture; superconducting microwave devices; glass wafer treatment; microelectromechanical system; micromechanical element manufacturing processes; microwave devices; silicon wafer treatment; Aluminum; Glass; Gold; Manufacturing processes; Micromechanical devices; Microwave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave & Telecommunication Technology, 2007. CriMiCo 2007. 17th International Crimean Conference
Conference_Location
Crimea
Print_ISBN
978-966-335-012-7
Type
conf
DOI
10.1109/CRMICO.2007.4368836
Filename
4368836
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