Title :
Sandwich type ferromagnetic RF integrated inductor
Author :
Yamaguchi, M. ; Baba, R. ; Arai, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
The first microfabrication of a sandwich type ferromagnetic RF integrated spiral inductor for the 2 GHz range is demonstrated. The two ferromagnetic CoNbZr films sandwich the spiral to enhance the magnetic flux linkage across the coil current. The inductance, L, of 7.9 nH and the qualify factor, Q, of 12.7 were obtained for a 200 /spl mu/m/spl times/400 /spl mu/m size 4-turn rectangular spiral at f=2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%.
Keywords :
Q-factor; UHF devices; UHF integrated circuits; coils; ferromagnetism; inductors; magnetic flux; magnetic thin films; 2 GHz; CoNbZr; RF integrated inductor; RFIC; coil current; ferromagnetic CoNbZr films; four-turn rectangular spiral; magnetic flux linkage; microfabrication; qualify factor; sandwich type ferromagnetic inductor; spiral inductor; Amorphous magnetic materials; Coils; Inductance; Magnetic films; Magnetic flux; Magnetic resonance; Magnetization; Radio frequency; Spirals; Thin film inductors;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.966867
