Title :
Sensors And Actuators For Small Motions
Author_Institution :
AT&T Bell Laboratories
Keywords :
Actuators; Area measurement; Atom optics; Displacement control; Displacement measurement; Equations; Force control; Force measurement; Optical interferometry; Position measurement;
Conference_Titel :
Nuclear Science Symposium, 1990. Conference record : Including Sessions on Nuclear Power Systems and Medical Imaging Conference, 1990 IEEE
Print_ISBN :
0-87942-683-7
DOI :
10.1109/NSSMIC.1990.693272