DocumentCode
1919893
Title
Analysing Antenna Ratio Dependence of Plasma Charging Damage with Weibull Breakdown Statistics
Author
Van den Bosch, Geert ; Creusen, Martin ; Degraeve, Robin ; Kaczer, Ben ; Groeseneken, Guido
Author_Institution
IMEC, Leuven, Belgium
fYear
2000
fDate
11-13 September 2000
Firstpage
528
Lastpage
531
Keywords
Antenna theory; CMOS technology; Circuit testing; Electric breakdown; Plasma measurements; Plasma properties; Plasma simulation; Statistical analysis; Statistics; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194831
Filename
1503761
Link To Document