Title :
Dielectric pockets – a new concept of the junctions for deca-nanometric CMOS devices
Author :
Jurczak, M. ; Skotnicki, T. ; Monfray, S. ; Gwoziecki, R. ; Paoli, Mario ; Tormen, B. ; Ribot, P. ; Dutartre, D. ; Galvier, J.
Author_Institution :
Warsaw University of Technology, Poland
Keywords :
CMOS technology; Dielectric devices; Dielectric substrates; Doping; Epitaxial growth; Etching; MOS devices; Microelectronics; Telecommunications; Threshold voltage;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Conference_Location :
Cork, Ireland
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194833
