DocumentCode

1920006

Title

Short Channel Vertical Sidewall Transistors

Author

Schulz, T. ; Rösner, W. ; Risch, L. ; Langmann, U.

Author_Institution

Infineon Technologies AG, Munich, Germany

fYear

2000

fDate

11-13 September 2000

Firstpage

552

Lastpage

555

Keywords

CMOS process; Doping; Etching; Fabrication; Lithography; MOSFETs; Silicon; Switches; Tellurium; Transconductance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

conf

DOI

10.1109/ESSDERC.2000.194837

Filename

1503767