Title :
DC-26 GHz MEMS series-shunt absorptive switches
Author :
Guan-Leng Tan ; Rebeiz, G.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
The design and performance of a wideband coplanar waveguide (CPW) DC-26 GHz MEMS absorptive switch on silicon substrate is presented. The absorptive switch utilizes novel DC-contact series and shunt fixed-fixed beam MEMS switches with ´dimples´ at the contact area for improved contact resistance. An insertion loss of 0.5 dB or better is achieved from DC-26 GHz. The isolation is -40 dB at 5 GHz, -35 dB at 10 GHz and -25 dB at 26 GHz. These switches are useful in applications where good return loss is required in the isolation state.
Keywords :
contact resistance; coplanar waveguide components; micromechanical devices; microwave switches; 0 to 26 GHz; 0.5 dB; DC contact; MEMS series-shunt absorptive switch; RF isolation; Si; contact resistance; coplanar waveguide component; fixed-fixed beam; insertion loss; return loss; silicon substrate; wideband microwave switch; Bandwidth; Bridge circuits; Coplanar waveguides; Insertion loss; Micromechanical devices; Microswitches; Resistors; Silicon; Switches; Wideband;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.966898
