Title :
P1–13: Revised fabrication of field emitters with a multi-stacked electrostatic lens
Author :
Yoshida, Tomoya ; Nagao, Masayoshi ; Koda, Nobuko ; Koike, Akifumi ; Tagami, Tomoya ; Takagi, Yasuo ; Neo, Yoichiro ; Mimura, Hidenori ; Sakai, Kentaro ; Murata, Hidekazu ; Shimizu, Takashi ; Kanemaru, Seigo
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
The concept of column-less SEM using field emitter with a multi-stacked electrostatic lens (multi-gate FE) is proposed. To realize the column-less SEM, we revised fabrication process of the multi-gate FE.
Keywords :
electrostatic lenses; field emission; scanning electron microscopes; column-less scanning electron microscopes; field emitters; multi-stacked electrostatic lens; Electrodes; Fabrication; Iron; Lenses; Logic gates; Resists; Scanning electron microscopy; column-less SEM; einzel lens; electrostatic lens; field emitter array; scanning electron microscope;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563184
