• DocumentCode
    1920349
  • Title

    P1–13: Revised fabrication of field emitters with a multi-stacked electrostatic lens

  • Author

    Yoshida, Tomoya ; Nagao, Masayoshi ; Koda, Nobuko ; Koike, Akifumi ; Tagami, Tomoya ; Takagi, Yasuo ; Neo, Yoichiro ; Mimura, Hidenori ; Sakai, Kentaro ; Murata, Hidekazu ; Shimizu, Takashi ; Kanemaru, Seigo

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2010
  • fDate
    26-30 July 2010
  • Firstpage
    54
  • Lastpage
    55
  • Abstract
    The concept of column-less SEM using field emitter with a multi-stacked electrostatic lens (multi-gate FE) is proposed. To realize the column-less SEM, we revised fabrication process of the multi-gate FE.
  • Keywords
    electrostatic lenses; field emission; scanning electron microscopes; column-less scanning electron microscopes; field emitters; multi-stacked electrostatic lens; Electrodes; Fabrication; Iron; Lenses; Logic gates; Resists; Scanning electron microscopy; column-less SEM; einzel lens; electrostatic lens; field emitter array; scanning electron microscope;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
  • Conference_Location
    Palo Alto, CA
  • Print_ISBN
    978-1-4244-7889-7
  • Electronic_ISBN
    978-1-4244-7888-0
  • Type

    conf

  • DOI
    10.1109/IVNC.2010.5563184
  • Filename
    5563184
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1920349