DocumentCode :
1920428
Title :
Tribological characteristics of SiNx film
Author :
Wen, Jianming ; Ying, Xiao ; Wong, King ; Barth, Gunter ; Chen, GaLane
Author_Institution :
Quinta Corp.
fYear :
1999
fDate :
18-21 May 1999
Keywords :
Dielectric substrates; Magnetic heads; Magnetooptic effects; Memory; Optical films; Optical microscopy; Plastics; Silicon compounds; Sputtering; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
Type :
conf
DOI :
10.1109/INTMAG.1999.837115
Filename :
837115
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1920428
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