Title :
Sol-gel lead zirconate-titanate thin films: effect of solution concentration
Author :
Livage, C. ; Safari, A. ; Klein, L.C.
Author_Institution :
Rutgers Univ., Piscataway, NJ, USA
fDate :
30 Aug-2 Sep 1992
Abstract :
The microstructure development in lead zirconate titanate (PZT) compositions near the morphotropic phase boundary, PZT (50 PT/50 PZ) and PNZT (2 Nb2O5/53 PT/45 PZ), has been investigated by scanning electron microscopy (SEM), optical microscopy, and X-ray diffraction analysis (XRD). The molar concentration of the precursor alkoxide solution has been increased to 0.75-M from the concentration of around 0.20M used in previous studies. Thin films have been fabricated by spin coating Pt/Ti/SiO2/Si substrates with the alkoxide solution. It is found that, in the solutions with high molar concentrations, the perovskite phase forms at lower temperatures than found previously in dilute solutions. In addition, the microstructure of the films is dense and uniform, showing none of the spherulites found previously
Keywords :
X-ray diffraction examination of materials; crystal microstructure; ferroelectric thin films; heat treatment; lead compounds; optical microscopy; scanning electron microscope examination of materials; sol-gel processing; 600 C; PNZT; PZT; PbZrO3TiO3; Pt-Ti-SiO2-Si substrate; SEM; X-ray diffraction analysis; XRD; ferroelectric thin film; microstructure; molar concentration; morphotropic phase boundary; optical microscopy; perovskite phase; precursor alkoxide solution; scanning electron microscopy; sol-gel processing; solution concentration effect; spin coating; Electron optics; Microstructure; Niobium; Optical diffraction; Optical films; Optical microscopy; Scanning electron microscopy; Titanium compounds; Transistors; X-ray diffraction;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300596
