Structural investigation of thin film PLZT using X-ray absorption spectroscopy

Author

Greegor, R.B. ; Lytle, F.W. ; Wu, A.Y.

Author_Institution

Boeing Co., Seattle, WA, USA

fYear

1992

fDate

30 Aug-2 Sep 1992

Firstpage

436

Lastpage

439

Abstract

The structural properties of RF magnetron-sputter-deposited lead lanthanum zirconate titanate (PLZT) were investigated using X-ray absorption near edge spectroscopy (XANES). Four samples were selected for XANES analysis: (1) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited on Al₂O₃, (2) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited in SiO₂ (2 μm) over Si(100), (3) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited on SiO₂, and (4) a commercial ceramic wafer of PLZT 9/65/35. The XANES experiments were performed using electron yield and fluorescence techniques. Data were taken at the Ti K-edge (4966 eV) and compared to reference spectra of the PLZT most closely resembling perovskite (SrTiO₃). The surface and bulk thin film were similar and all the 28/0/100 spectra resembled those of 9/65/35, indicating similar cubic perovskite structures for these materials

Keywords

XANES; ferroelectric thin films; lead compounds; sputtered coatings; (100) surface; 4500 angstroms; PLZT; PbLaZrO3TiO3; RF magnetron sputter deposition; X-ray absorption near edge spectroscopy; XANES analysis; ceramic wafer; cubic perovskite structures; electron yield; fluorescence techniques; reference spectra; Ceramics; Electromagnetic wave absorption; Electrons; Lanthanum; Magnetic analysis; Magnetic properties; Radio frequency; Spectroscopy; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on

Conference_Location

Greenville, SC

Print_ISBN

0-7803-0465-9

Type

conf

DOI

10.1109/ISAF.1992.300598

Filename

300598