Title :
Structural investigation of thin film PLZT using X-ray absorption spectroscopy
Author :
Greegor, R.B. ; Lytle, F.W. ; Wu, A.Y.
Author_Institution :
Boeing Co., Seattle, WA, USA
fDate :
30 Aug-2 Sep 1992
Abstract :
The structural properties of RF magnetron-sputter-deposited lead lanthanum zirconate titanate (PLZT) were investigated using X-ray absorption near edge spectroscopy (XANES). Four samples were selected for XANES analysis: (1) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited on Al2O3, (2) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited in SiO2 (2 μm) over Si(100), (3) a highly oriented PLZT 28/0/100 film (~4500 Å) deposited on SiO2, and (4) a commercial ceramic wafer of PLZT 9/65/35. The XANES experiments were performed using electron yield and fluorescence techniques. Data were taken at the Ti K-edge (4966 eV) and compared to reference spectra of the PLZT most closely resembling perovskite (SrTiO3). The surface and bulk thin film were similar and all the 28/0/100 spectra resembled those of 9/65/35, indicating similar cubic perovskite structures for these materials
Keywords :
XANES; ferroelectric thin films; lead compounds; sputtered coatings; (100) surface; 4500 angstroms; PLZT; PbLaZrO3TiO3; RF magnetron sputter deposition; X-ray absorption near edge spectroscopy; XANES analysis; ceramic wafer; cubic perovskite structures; electron yield; fluorescence techniques; reference spectra; Ceramics; Electromagnetic wave absorption; Electrons; Lanthanum; Magnetic analysis; Magnetic properties; Radio frequency; Spectroscopy; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300598
