Title :
Laser measurements and simulations of FBAR dispersion relation
Author :
Fattinger, G.G. ; Tikka, P.T.
Author_Institution :
Johannes Kepler Univ., Linz, Austria
Abstract :
In order to gain a better understanding of the behavior of thin-film bulk-acoustic-wave devices it is necessary to know the dispersion relation of an investigated layer stack. A laser interferometric measurement technique for mechanical surface vibrations is used, providing data to which numerical dispersion calculations are fitted. This method turned out to be a reliable source to determine the material parameters.
Keywords :
acoustic dispersion; bulk acoustic wave devices; light interferometry; measurement by laser beam; thin film devices; vibration measurement; dispersion relation; laser interferometry; layer stack; measurement technique; mechanical surface vibration; numerical simulation; thin-film bulk-acoustic-wave device; Analytical models; Dispersion; Electrodes; Equations; Film bulk acoustic resonators; Frequency; Masers; Materials reliability; Ultrasonic variables measurement; Zinc oxide;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.966909
