Deposition and properties of PLT thin films by magnetron sputtering from powder target

Author

Luo, Wei-Gen ; Ding, Ai-Li ; Zhang, Rui-Tao ; Huang, Yu-Hong ; Ge, Min

Author_Institution

Shanghai Inst. of Ceramics, Chinese Acad. of Sci., China

fYear

1992

fDate

30 Aug-2 Sep 1992

Firstpage

19

Lastpage

22

Abstract

The processes, structures, and electrooptical properties of lanthanum-modified lead titanate (PLT) thin films prepared by RF magnetron sputtering from sintered powder targets were studied. Highly oriented PLT thin films on glass and (0001) Al₂O₃ substrate, and epitaxial PLT thin films and (100) SrTiO₃ have been deposited. The growth mechanism of oriented PLT thin film on amorphous glass is discussed. The electrooptical coefficient (R>0.6×10^-16 m²/v²) of PLT films on glass was measured by a method based on the Faraday magnetooptical effect

Keywords

Faraday effect; electro-optical effects; epitaxial layers; ferroelectric thin films; lanthanum compounds; lead compounds; sputter deposition; sputtered coatings; (PbLa)TiO₃; Al₂O₃ substrate; Faraday magnetooptical effect; SrTiO₃; amorphous glass; electrooptical coefficient; electrooptical properties; epitaxial (Pb,La)TiO₃ thin films; growth mechanism; powder target; radiofrequency magnetron sputtering; Amorphous magnetic materials; Amorphous materials; Glass; Magnetic properties; Powders; Radio frequency; Sputtering; Substrates; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on

Conference_Location

Greenville, SC

Print_ISBN

0-7803-0465-9

Type

conf

DOI

10.1109/ISAF.1992.300611

Filename

300611