Title :
Ferroelectric copolymer and IR sensor technology applied to obstacle detection
Author :
Bauer, F. ; Simonne, J.J. ; Audaire, L.
Author_Institution :
Inst. de Recherche Franco-Allemand, Saint-Louis, France
fDate :
30 Aug-2 Sep 1992
Abstract :
The design of an integrated sensing system including a silicon structure and a P(VDFO.7-TRFEO.3) copolymer is presented. The monolithic integrated sensor is based on a pyroelectric thermal P(VDF.7-TRFEO.3) copolymer detector, a polyimide microelectronic photoresist for thermal insulation, and a standard process silicon read-out circuit. Studies undertaken to realize the system are described. The ISL poling process is examined, and pyroelectric characteristics are presented. The intrinsic ferroelectric properties of the copolymer used are also given. As an application, a prototype infrared sensor giving a 32×32 copolymer focal plane array has been developed
Keywords :
conducting polymers; ferroelectric materials; infrared imaging; photodetectors; polymer blends; pyroelectric devices; IR sensor technology; ISL poling process; Si read out circuit; copolymer focal plane array; ferroelectric copolymer; integrated sensing system; intrinsic ferroelectric properties; monolithic integrated sensor; obstacle detection; polyimide microelectronic photoresist; prototype infrared sensor; pyroelectric characteristics; pyroelectric thermal polyvinylidene fluoride trifluoroethylene copolymer detector; thermal insulation; Detectors; Ferroelectric materials; Infrared sensors; Integrated circuit technology; Polyimides; Pyroelectricity; Sensor arrays; Sensor phenomena and characterization; Silicon on insulator technology; Thermal sensors;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300614
