Title :
6.2: A multi-gated FEA for low energy acceleration micro-column microscopes
Author :
Koike, Akifumi ; Tagami, Tomoya ; Takagi, Yasuo ; Fujino, Takahiro ; Aoki, Toru ; Neo, Yoichiro ; Mimura, Hidenori ; Nagao, Masayoshi ; Yoshida, Tomoya ; Murata, Hidekazu ; Sakai, Kentaro
Author_Institution :
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
Abstract :
The quintuple-gated FEA was measured its specific electron beam spot diameter by improved Knife-Edged method. This result suggested that the spot diameter was less than 40μm at 1mm distance. Developing this result, we proposed a concept of micro-column electron beam microscopes using multi-gated FEA. In a simplest configuration for fabrication the device, means structure was not optimized for microscopes, the spot diameter was estimated as around 60nm at 30μm distance by numerical simulation. The details of that proposed configuration and estimation method are described in this paper.
Keywords :
electron beams; finite element analysis; electron beam spot diameter; knife-edged method; low energy acceleration microcolumn microscopes; microcolumn electron beam microscopes; multigated FEA; numerical simulation; quintuple-gated FEA; Electron beams; Electron microscopy; Lenses; Logic gates; Numerical models; Semiconductor device measurement; Crossover; Electron Beam Microscopes; Electrostatics Lens; Micro-Column; Multi-Gated FEA;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location :
Palo Alto, CA
Print_ISBN :
978-1-4244-7889-7
Electronic_ISBN :
978-1-4244-7888-0
DOI :
10.1109/IVNC.2010.5563206
