• DocumentCode
    1921511
  • Title

    Piezoelectric bimorphs with quadratic behavior using biased ZnO on Si3N4

  • Author

    Smits, Jan G. ; Choi, Wai-shing

  • Author_Institution
    Dept. of Electr. Eng., Boston Univ., MA, USA
  • fYear
    1992
  • fDate
    30 Aug-2 Sep 1992
  • Firstpage
    164
  • Lastpage
    166
  • Abstract
    Piezoelectric bimorphs have been made by sputtering ZnO on Si3N4. The ZnO was sandwiched between Cr/Au electrodes. Bimorphs 1688- and 2980-μm long were produced. The frequency dependence of the tip deflection of the bimorphs was measured. It was observed that the deflection increases with biasing voltage, as was to be expected from static deflection measurements
  • Keywords
    II-VI semiconductors; piezoelectric materials; piezoelectric thin films; sputtered coatings; zinc compounds; Cr-ZnO-Au; Cr/Au electrodes; Si3N4; biased ZnO; biasing voltage; frequency dependence; piezoelectric biomorphs; quadratic behavior; sputtering; static deflection measurements; tip deflection; Electrodes; Electrostriction; Equations; Hafnium; Heating; Resists; Sputter etching; Structural beams; Voltage; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
  • Conference_Location
    Greenville, SC
  • Print_ISBN
    0-7803-0465-9
  • Type

    conf

  • DOI
    10.1109/ISAF.1992.300652
  • Filename
    300652
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1921511