Title :
Piezoelectric bimorphs with quadratic behavior using biased ZnO on Si3N4
Author :
Smits, Jan G. ; Choi, Wai-shing
Author_Institution :
Dept. of Electr. Eng., Boston Univ., MA, USA
fDate :
30 Aug-2 Sep 1992
Abstract :
Piezoelectric bimorphs have been made by sputtering ZnO on Si3N4. The ZnO was sandwiched between Cr/Au electrodes. Bimorphs 1688- and 2980-μm long were produced. The frequency dependence of the tip deflection of the bimorphs was measured. It was observed that the deflection increases with biasing voltage, as was to be expected from static deflection measurements
Keywords :
II-VI semiconductors; piezoelectric materials; piezoelectric thin films; sputtered coatings; zinc compounds; Cr-ZnO-Au; Cr/Au electrodes; Si3N4; biased ZnO; biasing voltage; frequency dependence; piezoelectric biomorphs; quadratic behavior; sputtering; static deflection measurements; tip deflection; Electrodes; Electrostriction; Equations; Hafnium; Heating; Resists; Sputter etching; Structural beams; Voltage; Zinc oxide;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300652
