Title :
MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters
Author :
Scardelletti, Maximilian C. ; Ponchak, George E. ; Varaljay, Nicholas C.
Author_Institution :
NASA Glenn Res. Center, Cleveland, OH, USA
Abstract :
Ka-band MEMS doubly anchored cantilever beam capacitive shunt devices are used to demonstrate a MEMS SPDT switch fabricated on high resistivity silicon (HRS) utilizing finite ground coplanar waveguide (FGC) transmission lines. The SPDT switch has an insertion loss (IL), return loss (RL), and isolation of 0.3 dB, 40 dB, and 30 dB, respectively, at Ka-band.
Keywords :
antenna feeds; coplanar transmission lines; coplanar waveguide components; micromachining; microswitches; microwave phase shifters; microwave switches; silicon; substrates; 26.5 GHz; Ka-band; MEMS; SPDT switch; Si; capacitive shunt devices; doubly anchored cantilever beam devices; finite ground coplanar waveguide; high resistivity silicon substrate; insertion loss; isolation; phased array antennas; return loss; single-pole double-throw switch; switched line phase shifters; transmission lines; Communication switching; Coplanar transmission lines; Coplanar waveguides; Frequency; Micromechanical devices; Phase shifters; Power transmission lines; Silicon; Structural beams; Switches;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2002. IEEE
Print_ISBN :
0-7803-7330-8
DOI :
10.1109/APS.2002.1016014
