Title :
Measured performance and micro-fabrication of racetrack power inductors
Author :
Harburg, Daniel V. ; Hanson, Alex J. ; Yue Song ; Jizheng Qiu ; Rui Tian ; Levey, Christopher G. ; Sullivan, C.R. ; Otten, David
Author_Institution :
Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA
Abstract :
This paper presents micro-fabrication results and electrical performance measurements for chip-scale racetrack power inductors. Magnetic components with sputtered Co-Zr-O magnetic cores are demonstrated in a multi-megahertz dc-dc converter for solid-state lighting applications. The dc-dc converter achieves an 89% conversion efficiency at 5 MHz with an inductor power density of 1 W/mm2 of substrate area. Small-signal measurements of the inductors are compared with modeled predictions to validate the design optimization approach. Fabricated components achieved inductance values of 1.2 μH and peak quality factors of 15.1 at 8.3 MHz.
Keywords :
DC-DC power convertors; cobalt compounds; lighting; magnetic materials; microfabrication; power inductors; transformer cores; zirconium compounds; CoZrO; chip scale racetrack power inductors; efficiency 89 percent; electrical performance measurements; frequency 5 MHz; frequency 8.3 MHz; magnetic components; microfabrication; modeled predictions; multimegahertz dc dc converter; solid state lighting applications; sputtered magnetic cores; Electrical resistance measurement; Fabrication; Geometry; Inductance; Inductors; Magnetic cores; Windings; Magnetics; dc-dc converter; integrated magnetics; microfabrication; power supply on chip; thin-film materials;
Conference_Titel :
Energy Conversion Congress and Exposition (ECCE), 2013 IEEE
Conference_Location :
Denver, CO
DOI :
10.1109/ECCE.2013.6646758
