Measured performance and micro-fabrication of racetrack power inductors

Author

Harburg, Daniel V. ; Hanson, Alex J. ; Yue Song ; Jizheng Qiu ; Rui Tian ; Levey, Christopher G. ; Sullivan, C.R. ; Otten, David

Author_Institution

Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA

fYear

2013

fDate

15-19 Sept. 2013

Firstpage

614

Lastpage

620

Abstract

This paper presents micro-fabrication results and electrical performance measurements for chip-scale racetrack power inductors. Magnetic components with sputtered Co-Zr-O magnetic cores are demonstrated in a multi-megahertz dc-dc converter for solid-state lighting applications. The dc-dc converter achieves an 89% conversion efficiency at 5 MHz with an inductor power density of 1 W/mm² of substrate area. Small-signal measurements of the inductors are compared with modeled predictions to validate the design optimization approach. Fabricated components achieved inductance values of 1.2 μH and peak quality factors of 15.1 at 8.3 MHz.

Keywords

DC-DC power convertors; cobalt compounds; lighting; magnetic materials; microfabrication; power inductors; transformer cores; zirconium compounds; CoZrO; chip scale racetrack power inductors; efficiency 89 percent; electrical performance measurements; frequency 5 MHz; frequency 8.3 MHz; magnetic components; microfabrication; modeled predictions; multimegahertz dc dc converter; solid state lighting applications; sputtered magnetic cores; Electrical resistance measurement; Fabrication; Geometry; Inductance; Inductors; Magnetic cores; Windings; Magnetics; dc-dc converter; integrated magnetics; microfabrication; power supply on chip; thin-film materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Energy Conversion Congress and Exposition (ECCE), 2013 IEEE

Conference_Location

Denver, CO

Type

conf

DOI

10.1109/ECCE.2013.6646758

Filename

6646758