Title :
Impact of Deep N-well Implantation on Substrate Noise Coupling and RF Transistor Performance for Systems-on-a-Chip Integration
Author :
Chew, K.W. ; Zhang, J. ; Shao, K. ; Loh, W.B. ; Chu, S.-F.
Author_Institution :
Chartered Semiconductor Manufacturing Ltd, Singapore
fDate :
24-26 September 2002
Keywords :
CMOS process; CMOS technology; Clocks; Coupling circuits; Digital circuits; Implants; Integrated circuit noise; Radio frequency; Semiconductor device noise; Substrates;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194917
