Title :
Phase-shifting interferometry to determine the absolute diameter of a silicon sphere using a frequency-tunable diode laser
Author :
Xuejian Wu ; Yan Li ; Haoyun Wei ; Jitao Zhang
Author_Institution :
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
Abstract :
In this contribution, a chain of temporal synthetic wavelengths, generated by use of a frequency-tunable diode laser calibrated by an optical frequency comb, is used to measure the absolute diameter with an accuracy of 3 nm in air, where the fractional interference phase is measured by phase-shifting interferometry.
Keywords :
diameter measurement; elemental semiconductors; laser tuning; measurement by laser beam; phase shifting interferometry; semiconductor lasers; silicon; Si; absolute diameter; fractional interference phase; frequency-tunable diode laser; optical frequency comb; phase-shifting interferometry; silicon sphere; temporal synthetic wavelengths; Frequency measurement; Measurement by laser beam; Optical interferometry; Phase measurement; Phase shifting interferometry; Semiconductor lasers; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4799-0593-5
DOI :
10.1109/CLEOE-IQEC.2013.6801197
