Title :
Lateral Trench Gate Super-Junction SOI-LDMOSFETs with Low On-Resistance
Author :
Park, Jong Mun ; Klima, Robert ; Selberherr, Siegfried
Author_Institution :
Institute for Microelectronics, TU Vienna, Austria
fDate :
24-26 September 2002
Keywords :
Automotive engineering; Degradation; Doping; Immune system; MOSFETs; Microelectronics; Numerical simulation; Silicon on insulator technology;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194924
