Title :
Kinetic-energy distributions of ions sampled from RF discharges in argon/helium gas mixtures
Author :
Olthoff, J.K. ; Radovanov, S.B. ; Van Brunt, R.J. ; Rees, J.A.
Author_Institution :
NIST, Gaithersburg, MD, USA
Abstract :
Summary form only given. The authors have studied the kinetic energies of ions created by RF discharges in argon/helium mixtures by sampling ions through the grounded electrode of a GEC RF Reference Cell. Ion kinetic-energy distributions (IED) of Ar/sup +/, Ar/sub 2sup +/, Ar/sup ++/, ArH/sup +/, He/sup +/, and ArHe/sup +/, as measured by an electrostatic energy analyzer with a quadrupole mass spectrometer, have been determined. The plasma conditions were as follows: pressures of 13.3 Pa or 1.33 Pa, peak-to-peak applied voltages from 200 to 500 V, helium concentrations in argon of 0 to 95%, and flow rates of 10 sccm.
Keywords :
high-frequency discharges; 1.33 Pa; 13.3 Pa; 200 to 500 V; Ar-He; Ar/sub 2sup +/; Ar/sup +/; Ar/sup 2+/; ArH/sup +/; ArHe/sup +/; He/sup +/; RF Reference Cell; RF discharges; electrostatic energy analyzer; flow rates; kinetic-energy distributions; peak-to-peak applied voltages; plasma conditions; quadrupole mass spectrometer; Argon; Electrodes; Electrostatic analysis; Electrostatic measurements; Energy measurement; Helium; Kinetic energy; Plasma measurements; Radio frequency; Sampling methods;
Conference_Titel :
Plasma Science, 1993. IEEE Conference Record - Abstracts., 1993 IEEE International Conference on
Conference_Location :
Vancouver, BC, Canada
Print_ISBN :
0-7803-1360-7
DOI :
10.1109/PLASMA.1993.593095
