DocumentCode
1922295
Title
Exploring Methods for Adequate Simulation of Sub-100nm Devices
Author
Moroz, Victor ; Strecker, Norbert ; Jaraiz, Martin
Author_Institution
Synopsys, Inc., Mountain View, CA, USA
fYear
2002
fDate
24-26 September 2002
Firstpage
299
Lastpage
302
Keywords
Atom optics; Electronics industry; Equations; Lithography; MOSFET circuits; Optical design; Optical distortion; Rapid thermal annealing; Semiconductor process modeling; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN
88-900847-8-2
Type
conf
DOI
10.1109/ESSDERC.2002.194928
Filename
1503858
Link To Document