Elevated Co-Silicide for sub-100nm High Performance and RF CMOS
Author :
Jurczak, M. ; de Potter, M. ; Rooyackers, R. ; Jeamsaksiri, W. ; Redolfi, A. ; Grau, L. ; Lauwers, A. ; Lindsay, R. ; Peytier, I. ; Augendre, E. ; Badenes, G.
Author_Institution :
IMEC, Leuven, Belgium
fYear :
2002
fDate :
24-26 September 2002
Firstpage :
311
Lastpage :
314
Keywords :
Radio frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
