Title :
High Performance 0.1um CMOS Device with Suppressed Parasitic Junction Capacitance and Junction Leakage Current
Author :
Kim, Hyun Sik ; Pandey, Shesh Mani ; Ong, Shiang Yang ; Sarkar, Manju ; Teh, Young Way ; Benistant, Francis ; Quek, Elgin ; Bhat, Mousumi ; Chu, Sanford
Author_Institution :
Chartered Semiconductor Manufacturing Ltd., Sigapore, Singapore
fDate :
24-26 September 2002
Keywords :
Leakage current; Parasitic capacitance;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194933
