Title :
Fabrication of double rectangular type FeTaN film inductor
Author :
Shin, Dong-hoon ; Choong-Sik Kim ; Lee, Chang-Ho ; Nam, Seoung-eui ; Hyoung-June Kim
Author_Institution :
Hong-lk University
Keywords :
Coils; Degradation; Fabrication; Frequency response; Inductance; Magnetic films; Q factor; Resonance; Resonant frequency; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837220
