مرکز منطقه ای اطلاع رساني علوم و فناوري - Reduction of Bitline to Control Gate Leakage for Improved Embedded 0.18 um FLASH Yield and Reliability

DocumentCode :

1922645

Title :

Reduction of Bitline to Control Gate Leakage for Improved Embedded 0.18 um FLASH Yield and Reliability

Author :

Cacciato, A. ; Nelson, S. ; Diekema, M. ; Hendriks, M. ; van Marwijk, L. ; Deuper, C. ; Gerritsen, E. ; Verhaar, R. ; Dormans, D.

Author_Institution :

Philips Semiconductors, Nijmegen, The Netherlands

fYear :

2002

fDate :

24-26 September 2002

Firstpage :

355

Lastpage :

358

Keywords :

Gate leakage;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN :

88-900847-8-2

Type :

conf

DOI :

10.1109/ESSDERC.2002.194942

Filename :

1503872

Link To Document :