Title :
A Low On-Resistance 700V Charge Balanced LDMOS with Intersected WELL Structure
Author :
Kim, Min-Hwan ; Kim, Jong-Jib ; Choi, Young-Suk ; Jeon, Chang-Ki ; Kim, Sung-Lyong ; Kang, Hyun-Soon ; Song, Chang-Sub
Author_Institution :
Fairchild Semiconductor, Kyonggi-Do, Korea (South)
fDate :
24-26 September 2002
Keywords :
Breakdown voltage; Contacts; Doping; Electric breakdown; Electric resistance; Energy consumption; Low voltage; Maintenance; Silicon; Surface resistance;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194945
