Coulomb Blockade in Thin SOI Nanodevices

Author

Fraboulet, D. ; Jehl, X. ; Mariolle, D. ; Le Royer, C. ; Le Carval, G. ; Scheiblin, P. ; Rivallin, P. ; Mollard, L. ; Deleroyelle, D. ; Nier, M.E. ; Toffoli, A. ; Molas, G. ; De Salvo, B. ; Deleonibus, S. ; Sanquer, M.

Author_Institution

CEA-LETI, Grenoble, France

fYear

2002

fDate

24-26 September 2002

Firstpage

395

Lastpage

398

Keywords

Conductivity; Electrons; Etching; Fabrication; Geometry; MOSFET circuits; Quantum dots; Resists; Silicon; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194951

Filename

1503881

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