Electrode effects on electrical properties of ferroelectric thin films

Author

Vijay, D.P. ; Kwok, C.K. ; Pan, W. ; Yoo, I.K. ; Desu, S.B.

Author_Institution

Dept. of Mater. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA

fYear

1992

fDate

30 Aug-2 Sep 1992

Firstpage

408

Lastpage

411

Abstract

The degradation phenomena of lead zirconate titanate (PZT) films were investigated on Pt and RuO_x electrodes. The hysteresis properties were measured for different Zr/Ti ratios. Films with composition close to the morphotropic phase boundary showed high P _r and low E_c values on RuO_x electrodes for up to 2×10¹¹ test cycles. The degradation properties were studied as a function of film thickness by an accelerated unified test which can evaluate fatigue and breakdown simultaneously. It was observed that thinner PZT films on RuO_x electrodes showed the best electrical properties. Furthermore, under a DC field the thinner films showed lower leakage current and higher breakdown fields

Keywords

ceramics; dielectric hysteresis; electric breakdown of solids; fatigue; ferroelectric thin films; lead compounds; leakage currents; PZT-Pt; PZT-RuO_x; PbZrO3TiO3-Pt; PbZrO3TiO3-RuO; Pt electrodes; RuO_x electrodes; breakdown fields; degradation phenomena; electrical properties; fatigue; ferroelectric thin films; film thickness; hysteresis properties; leakage current; morphotropic phase boundary; Degradation; Electric breakdown; Electrodes; Ferroelectric films; Ferroelectric materials; Hysteresis; Life estimation; Testing; Titanium compounds; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on

Conference_Location

Greenville, SC

Print_ISBN

0-7803-0465-9

Type

conf

DOI

10.1109/ISAF.1992.300724

Filename

300724