Title :
A New Device Structure And Process Flow For A Low Leakage Pin-diode-based Integrated Detector Array
Author :
Snoeys, W. ; Plummer, J. ; Parker, S. ; Kenney, C.
Author_Institution :
Center for Integrated Systems, Stanford University, CA
Keywords :
Circuits; Contacts; Gettering; Infrared detectors; Ionizing radiation; Leak detection; Optical arrays; Radiation detectors; Sensor arrays; Temperature;
Conference_Titel :
Device Research Conference, 1991. 49th Annual
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-87942-647-0
DOI :
10.1109/DRC.1991.664680