New Mechanism of Body Charging in Partially Depleted SOI-MOSFETs with Ultra-thin Gate Oxides

Author

Pretet, J. ; Matsumoto, T. ; Poiroux, T. ; Cristoloveanu, S. ; Gwoziecki, R. ; Raynaud, C. ; Roveda, A. ; Brut, H.

Author_Institution

STMicroelectronics, France and IMEP, France

fYear

2002

fDate

24-26 September 2002

Firstpage

515

Lastpage

518

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194981

Filename

1503911

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