An Ultra-Thin Polycrystalline-Silicon Thin-Film Transistor with SiGe Raised Source/Drain

Author

Peng, Du-Zen ; Shih, Po-Sheng ; Zan, Hsiao-Wen ; Liao, Ta-Shun ; Chang, Chun-Yen

Author_Institution

Institute of Electronics, National Chiao Tung University, Taiwan

fYear

2002

fDate

24-26 September 2002

Firstpage

535

Lastpage

538

Keywords

Germanium silicon alloys; Silicon germanium; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194986

Filename

1503916

Link To Document