Title :
Phase shifters using (Ba,Sr)TiO/sub 3/ thin films on sapphire and glass substrates
Author :
Acikel, B. ; Yu Liu ; Nagra, A.S. ; Taylor, T.R. ; Hansen, P.J. ; Speck, J.S. ; York, R.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
Abstract :
In this paper, we present results from distributed phase shifter circuits that were fabricated on sapphire and glass substrates. The circuits employ voltage tunable (Ba,Sr)TiO/sub 3/ (BST) thin films deposited by rf magnetron sputtering. Both parallel-plate and interdigital capacitor structures are investigated. K/Ka-band phase shifters demonstrated a phase shift of 265/spl deg/ with an insertion loss of 5.8 dB at 20 GHz and 180/spl deg/ phase shift with an insertion loss of 4 dB at 30 GHz. Both circuits demonstrated a promising figure of merit /spl sim/60/spl deg//dB at 10 GHz. A C/X-band phase shifter demonstrated a phase shift of >460 degrees with an insertion loss of 8.8 dB at 8 GHz.
Keywords :
antenna phased arrays; barium compounds; coplanar waveguide components; delay lines; ferroelectric capacitors; ferroelectric thin films; microwave phase shifters; sputter deposition; strontium compounds; (Ba,Sr)TiO/sub 3/ thin films; 180/spl deg/ phase shift; 20 GHz; 30 GHz; 4 dB; 5.8 dB; 8 GHz; 8.8 dB; Al/sub 2/O/sub 3/; BaSrTiO/sub 3/; C/X-band phase shifter; K/Ka-band phase shifter; delay lines; distributed phase shifter circuits; figure of merit; glass substrate; insertion loss; interdigital capacitor structures; parallel-plate capacitor structures; phase shift; phased array antenna systems; rf magnetron sputtering; sapphire substrate; voltage tunable BST thin films; Binary search trees; Capacitors; Glass; Insertion loss; Magnetic circuits; Phase shifters; Sputtering; Thin film circuits; Tunable circuits and devices; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967105
