Title :
Mathematical modelling and measurement of etching profile for junction shape in MR read heads
Author :
Jeong, WonJe ; Shong, E.Y. ; Hahm, H.J. ; Min, K.L. ; Kim, Young K.
Author_Institution :
Samsung Electro-Merhanics
Keywords :
Etching; Mathematical model; Shape measurement;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837395
