Mathematical modelling and measurement of etching profile for junction shape in MR read heads

Author

Jeong, WonJe ; Shong, E.Y. ; Hahm, H.J. ; Min, K.L. ; Kim, Young K.

Author_Institution

Samsung Electro-Merhanics

fYear

1999

fDate

18-21 May 1999

Keywords

Etching; Mathematical model; Shape measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-5555-5

Type

DOI

10.1109/INTMAG.1999.837395

Filename

837395

Link To Document