DocumentCode
1925870
Title
Fabrication of spin-valve sensors with quarter micron trackwidth using a double-layer resist system
Author
Katakura, Tohru ; Miyauchi, Teiichi ; Mizuguchi, T.
Author_Institution
Sony Corporation
fYear
1999
fDate
18-21 May 1999
Keywords
Antiferromagnetic materials; Fabrication; Milling; Nonhomogeneous media; Plasma properties; Resists; Sensor phenomena and characterization; Sensor systems; Solvents; Sputter etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-5555-5
Type
conf
DOI
10.1109/INTMAG.1999.837396
Filename
837396
Link To Document