Design and implementation of micromachined lumped quadrature (90/spl deg/) hybrids

To reduce the chip size of a quadrature hybrid at frequencies below K-band, lumped components have been employed to replace the transmission line segments. Systematic analysis and design technique has been developed. For the first time, X-band lumped quadrature hybrids with low insertion loss and wide bandwidth have been fabricated using a micromachined process technology. Approximately, two order of magnitude area reduction has been achieved by this approach compared with distributed designs.