• DocumentCode
    1926656
  • Title

    Mechanical residual stress measurement for chromium, magnetic, and carbon films

  • Author

    Peng, Grant ; Wu, Fang ; Lin, Judy

  • Author_Institution
    Komag Inc.
  • fYear
    1999
  • fDate
    18-21 May 1999
  • Keywords
    Amorphous magnetic materials; Chromium; Magnetic films; Mechanical variables measurement; Optical films; Optical interferometry; Residual stresses; Stress measurement; Thermal stresses; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-5555-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1999.837433
  • Filename
    837433
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1926656