Title :
Mechanical residual stress measurement for chromium, magnetic, and carbon films
Author :
Peng, Grant ; Wu, Fang ; Lin, Judy
Author_Institution :
Komag Inc.
Keywords :
Amorphous magnetic materials; Chromium; Magnetic films; Mechanical variables measurement; Optical films; Optical interferometry; Residual stresses; Stress measurement; Thermal stresses; Transistors;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837433
