Title :
Delta-Doped Sagm-Avalanche Photodiodes
Author :
Kuchibhotla, R. ; Campbell, J.C. ; Tsai, C. ; Tsang, W.T.
Author_Institution :
Microelectronics Research Center, The University of Texas
Keywords :
Absorption; Bandwidth; Dark current; Electrical resistance measurement; Etching; Frequency measurement; Gain measurement; Light emitting diodes; Photodiodes; Substrates;
Conference_Titel :
Device Research Conference, 1991. 49th Annual
Conference_Location :
Boulder, CO, USA
Print_ISBN :
0-87942-647-0
DOI :
10.1109/DRC.1991.664699