Title :
Microfabrication of transformers and inductors for high frequency power conversion
Author :
Sullivan, Charles R. ; Sanders, Seth R.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Transformers and inductors fabricated with micron-scale magnetic-alloy and copper thin films are proposed for high-frequency power conversion applications. Fine patterning produced by photolithography reduces eddy current losses, resulting in very high power densities. Calculated design graphs and design examples for 10 MHz transformers are presented
Keywords :
eddy current losses; high-frequency transformers; inductors; micromachining; photolithography; power convertors; 10 MHz; Cu; copper thin films; eddy current losses reduction; fine patterning; high frequency power conversion; inductors; micron-scale magnetic-alloy; photolithography; power converters; transformers; Costs; Eddy currents; Ferrites; Frequency conversion; Magnetic heads; Magnetic materials; Magnetic recording; Power conversion; Thin film inductors; Transformers;
Conference_Titel :
Power Electronics Specialists Conference, 1993. PESC '93 Record., 24th Annual IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-1243-0
DOI :
10.1109/PESC.1993.472078
