Design and tolerance analysis of a 21 GHz CPW-fed, slot-coupled, microstrip antenna on etched silicon

Author

Trent, Chris R. ; Weller, Tom M.

Author_Institution

Wireless & Microwave Group, Univ. of South Florida, Tampa, FL, USA

Volume

1

fYear

2002

fDate

2002

Firstpage

402

Abstract

The paper discusses the design and study of a rectangular patch antenna, constructed on high-resistivity silicon and slot-coupled to a coplanar waveguide (CPW) feed-line. Bulk fabrication and etching processes are used to construct the dual-layered structure. The frequency response and radiation performance of the antenna are estimated from FEM simulations and verified experimentally at 21 GHz. Antenna performance deviations due to fabrication tolerances are studied and data are obtained from the statistical analysis of a designed experiment.

Keywords

antenna feeds; antenna radiation patterns; coplanar waveguides; design of experiments; etching; finite element analysis; frequency response; microstrip antenna arrays; silicon; slot antenna arrays; tolerance analysis; 21 GHz; CPW feed-line; FEM simulations; bulk fabrication; designed experiment; dual-layered structure; etched silicon; frequency response; high-resistivity silicon; performance deviations; radiation performance; rectangular patch antenna; slot-coupled microstrip antenna; statistical analysis; tolerance analysis; Coplanar waveguides; Etching; Fabrication; Frequency response; Microstrip antennas; Patch antennas; Rectangular waveguides; Silicon; Slot antennas; Tolerance analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium, 2002. IEEE

Print_ISBN

0-7803-7330-8

Type

conf

DOI

10.1109/APS.2002.1016332

Filename

1016332