DocumentCode

1929002

Title

New micromachind inductors on silicon substrates

Author

Park, Jae Y. ; Allen, Mark G.

Author_Institution

Georgia Institute of Technology

fYear

1999

fDate

18-21 May 1999

Keywords

Coils; Conductors; Copper; Frequency; Inductance; Inductors; Magnetic cores; Polyimides; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-5555-5

Type

conf

DOI

10.1109/INTMAG.1999.837555

Filename

837555