Title :
New micromachind inductors on silicon substrates
Author :
Park, Jae Y. ; Allen, Mark G.
Author_Institution :
Georgia Institute of Technology
Keywords :
Coils; Conductors; Copper; Frequency; Inductance; Inductors; Magnetic cores; Polyimides; Resists; Silicon;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837555
