DocumentCode
1930108
Title
Role of multiple shots of femtosecond laser pulses in periodic nanostructure formation on silicon surface
Author
Miyaji, G. ; Miyazaki, Koji
Author_Institution
Inst. of Adv. Energy, Kyoto Univ., Uji, Japan
fYear
2013
fDate
12-16 May 2013
Firstpage
1
Lastpage
1
Abstract
Self-organized periodic nanostructures much smaller than the laser wavelength are often produced on solid surfaces in femtosecond (fs) laser ablation [1]. It is well known that the nanostructure formation is sensitive to the experimental conditions, and superimposed multiple shots of low-fluence fs laser pulses are especially effective for the nanostructuring. However, the role of multiple shots of fs pulses, as well as the fundamental physics, in the nanostructuring is insufficiently understood, resulting in the difficult control of the interaction. Here we report the experimental study to make clear the effect of multiple shots of fs laser pulses on nanostructuring. The pump-probe reflectivity measurements for silicon (Si) have shown that the superimposed multiple shots of low-fluence fs pulses are crucial to the excitation of surface plasmon polaritons (SPPs) for the periodic nanoscale ablation through the non-thermal interaction [2].
Keywords
elemental semiconductors; high-speed optical techniques; laser ablation; nanofabrication; nanostructured materials; polaritons; self-assembly; semiconductor growth; silicon; surface plasmons; Si; femtosecond laser ablation; femtosecond laser pulses; low-fluence fs laser pulses; multiple shots; nonthermal interaction; periodic nanoscale ablation; periodic nanostructure formation; pump-probe reflectivity measurements; self-organized periodic nanostructures; silicon surface; solid surface; surface plasmon polaritons; Laser ablation; Laser excitation; Measurement by laser beam; Pump lasers; Reflectivity; Silicon; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location
Munich
Print_ISBN
978-1-4799-0593-5
Type
conf
DOI
10.1109/CLEOE-IQEC.2013.6801548
Filename
6801548
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