DocumentCode :
1930108
Title :
Role of multiple shots of femtosecond laser pulses in periodic nanostructure formation on silicon surface
Author :
Miyaji, G. ; Miyazaki, Koji
Author_Institution :
Inst. of Adv. Energy, Kyoto Univ., Uji, Japan
fYear :
2013
fDate :
12-16 May 2013
Firstpage :
1
Lastpage :
1
Abstract :
Self-organized periodic nanostructures much smaller than the laser wavelength are often produced on solid surfaces in femtosecond (fs) laser ablation [1]. It is well known that the nanostructure formation is sensitive to the experimental conditions, and superimposed multiple shots of low-fluence fs laser pulses are especially effective for the nanostructuring. However, the role of multiple shots of fs pulses, as well as the fundamental physics, in the nanostructuring is insufficiently understood, resulting in the difficult control of the interaction. Here we report the experimental study to make clear the effect of multiple shots of fs laser pulses on nanostructuring. The pump-probe reflectivity measurements for silicon (Si) have shown that the superimposed multiple shots of low-fluence fs pulses are crucial to the excitation of surface plasmon polaritons (SPPs) for the periodic nanoscale ablation through the non-thermal interaction [2].
Keywords :
elemental semiconductors; high-speed optical techniques; laser ablation; nanofabrication; nanostructured materials; polaritons; self-assembly; semiconductor growth; silicon; surface plasmons; Si; femtosecond laser ablation; femtosecond laser pulses; low-fluence fs laser pulses; multiple shots; nonthermal interaction; periodic nanoscale ablation; periodic nanostructure formation; pump-probe reflectivity measurements; self-organized periodic nanostructures; silicon surface; solid surface; surface plasmon polaritons; Laser ablation; Laser excitation; Measurement by laser beam; Pump lasers; Reflectivity; Silicon; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4799-0593-5
Type :
conf
DOI :
10.1109/CLEOE-IQEC.2013.6801548
Filename :
6801548
Link To Document :
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