Femtosecond laser micro and nano processing with nondiffracting Bessel and accelerating Airy beams

Author

Courvoisier, F. ; Mathis, A. ; Zhang, Juyong ; Froehly, L. ; Jukna, V. ; Furfaro, L. ; Jacquot, M. ; Giust, R. ; Lacourt, P.A. ; Couairon, A. ; Dudley, John M.

Author_Institution

Dept. d´Opt. P.M. Duffieux, Univ. de Franche-Comte, Besancon, France

fYear

2013

fDate

12-16 May 2013

Firstpage

1

Lastpage

1

Abstract

Summary form only given. Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.

Keywords

high-speed optical techniques; laser ablation; laser beams; accelerating airy beams; channel fabrication; femtosecond laser microprocessing; femtosecond laser nanoprocessing; laser ablated structure; laser material processing tool; nondiffracting Bessel airy beams; trench fabrication; Acceleration; Laser applications; Laser beams; Nonlinear optics; Particle beams; Trajectory; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference

Conference_Location

Munich

Print_ISBN

978-1-4799-0593-5

Type

conf

DOI

10.1109/CLEOE-IQEC.2013.6801555

Filename

6801555