Pulsed ion beam evaporation experiments at the Naval Research Laboratory

Summary form only given. Preliminary experiments have been carried out at Naval Research Laboratory using an apertured portion of the 1-MeV proton beam produced by the Gramble II generator. Evaporation of Al, Ta, ferrite, and YBCO films, at fluences of 30-80 J/cm/sup 2/, has been studied. Heated and room-temperature substrates of glass, Si, and MgO have been used. YBCO films with the proper stochiometry have been prepared. Ferrite films with crystalline structure have been prepared using unheated MgO substrates, and films with partial epitaxial growth have been obtained using heated substrates. Ferrite films deposited on Si substrates show fiber texture. The film morphologies show evidence of droplet deposition, and with Al films excessive condensation heating of the substrate is observed.