DocumentCode
1930669
Title
Micromachined RF MEMS tunable capacitors using piezoelectric actuators
Author
Park, J.Y. ; Yee, Y.J. ; Nam, H.J. ; Bu, J.U.
Author_Institution
Mater. & Devices Lab., LG Electron. Inst. of Technol., Seoul, South Korea
Volume
3
fYear
2001
fDate
20-24 May 2001
Firstpage
2111
Abstract
In this paper, RF MEMS tunable capacitors with low operation voltage, high linearity, high quality factor, and large tuning ratio have been fabricated by utilizing micromachined piezoelectric actuators. The fabricated tunable capacitor has a C/sub max//C/sub min/ ratio of 3.1 to 1 at bias voltages of 6 V and a quality factor of 210 at 1 GHz.
Keywords
Q-factor; capacitors; low-power electronics; microactuators; micromachining; piezoelectric actuators; tuning; 1 GHz; 6 V; RF MEMS tunable capacitor; linearity; low-voltage operation; micromachining; piezoelectric actuator; quality factor; tuning ratio; Capacitance; Capacitors; Electrodes; Micromechanical devices; Piezoelectric actuators; Q factor; Radiofrequency microelectromechanical systems; Tunable circuits and devices; Tuning; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location
Phoenix, AZ, USA
ISSN
0149-645X
Print_ISBN
0-7803-6538-0
Type
conf
DOI
10.1109/MWSYM.2001.967330
Filename
967330
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