Title :
Micromachined 60 GHz GaAs power sensor with integrated receiving antenna
Author :
Mutamba, K. ; Beilenhoff, K. ; Megej, A. ; Dorner, R. ; Genc, E. ; Fleckenstein, A. ; Heyman, P. ; Dickmann, J. ; Woelk, C. ; Hartnagel, H.L.
Author_Institution :
Inst. fuer Hochfrequenztech., Tech. Univ. Darmstadt, Germany
Abstract :
A micromachined 60 GHz GaAs power sensor with a monolithically-integrated receiving antenna is presented. In this sensor configuration the thermoelectrical properties of AlGaAs-GaAs heterostructures are used, so that no external DC power supply is needed. First measurements with separate sensor and antenna structures on the same chip have shown a broadband sensor response as well as an excellent matching between the antenna and the sensor input.
Keywords :
III-V semiconductors; MIMIC; electric sensing devices; gallium arsenide; micromachining; microsensors; millimetre wave detectors; millimetre wave measurement; power measurement; receiving antennas; 60 GHz; AlGaAs membrane; AlGaAs-GaAs; AlGaAs-GaAs heterostructures; MEMS; broadband sensor response; integrated receiving antenna; micromachined GaAs power sensor; monolithically-integrated antenna; thermoelectrical properties; Antenna measurements; Biomembranes; Broadband antennas; Dipole antennas; Gallium arsenide; Heating; Receiving antennas; Resistors; Semiconductor device measurement; Thermal sensors;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967361
