Fabrication and characterization of Co-Ni magnetic cantilevers

Author

Duch, M. ; Plaza, J.A. ; Villanueva, G. ; Perez, Roxana ; Esteve, J. ; Errachid, A. ; Samitier, Josep

Author_Institution

Instituto Microelectronico de Barcelona, Spain

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

201

Lastpage

204

Abstract

This work is focused on the fabrication of silicon cantilevers coated with magnetic material. An electrodeposited Co-Ni alloy has been used as a magnetic layer. The magnetic and mechanical properties are preliminary evaluated for the design of magnetic devices. The design and fabrication technology of cantilevers coated with Co-Ni films will be presented as an example of a magnetic actuator.

Keywords

cobalt alloys; electrodeposition; electromagnetic actuators; magnetic devices; nickel alloys; silicon; Co-Ni; Si; electrodeposition; magnetic actuator; magnetic cantilever; magnetic devices; magnetic layer; Actuators; Atomic force microscopy; Cobalt; Fabrication; Magnetic devices; Magnetic films; Magnetic materials; Magnetic resonance; Mechanical factors; Saturation magnetization;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504357

Filename

1504357

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1931748